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Development of a modular interferometric microscopy system for characterization of MEMS

Stichwort:

Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry

Schöpfer:

Klempner, Adam R.

Advisor:

Pryputniewicz, Ryszard J.

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2007-01-04

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering