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Filtering by: Advisor Pryputniewicz, Ryszard J. Keyword gyroscope

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Keyword:

MEMS, automation, Interferometry, and gyroscope

Creator:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering
Modeling of a folded spring supporting MEMS gyroscope

Keyword:

statics, folded springs, MEMS, gyroscope, and suspension

Creator:

Steward, Victoria

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2003-10-07

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering