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Study and characetrization of plastic encapsulated packages for MEMS

Keyword:

MEMS, packaging, plastic encapsulation, finite difference methods, OEH methodology, and Fick's second law of diffusion

Creator:

Deshpande, Anjali W

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2005-01-14

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering