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Filtering by: Contributor Marinis, Thomas F. Collections Masters Theses Publisher Worcester Polytechnic Institute

1. Development of a modular interferometric microscopy system for characterization of MEMS

Keyword:: Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry
Creator:: Klempner, Adam R.
Advisor:: Pryputniewicz, Ryszard J.
Publisher:: Worcester Polytechnic Institute
Date Created:: 2007-01-04
Resource Type:: Thesis
Degree:: MS
Unit (Department):: Mechanical Engineering

2. Study and characetrization of plastic encapsulated packages for MEMS

Keyword:: MEMS, packaging, plastic encapsulation, finite difference methods, OEH methodology, and Fick's second law of diffusion
Creator:: Deshpande, Anjali W
Advisor:: Pryputniewicz, Ryszard J.
Publisher:: Worcester Polytechnic Institute
Date Created:: 2005-01-14
Resource Type:: Thesis
Degree:: MS
Unit (Department):: Mechanical Engineering