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1. Development of a modular interferometric microscopy system for characterization of MEMS

Stichwort:: Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry
Schöpfer:: Klempner, Adam R.
Advisor:: Pryputniewicz, Ryszard J.
Herausgeber:: Worcester Polytechnic Institute
Datum erstellt:: 2007-01-04
Resource Type:: Thesis
Degree:: MS
Unit (Department):: Mechanical Engineering