Index Catalog // Digital WPI

Start Over

Filtering by: Contributor Willits, David S. Creator Marinis, Ryan Thomas

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Keyword:

MEMS, automation, Interferometry, and gyroscope

Creator:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

Publisher:

Worcester Polytechnic Institute

Date Created:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering