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筛选: Contributor Willits, David S.

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

关键词:

MEMS, automation, Interferometry, and gyroscope

创造者:

Marinis, Ryan Thomas

Advisor:

Pryputniewicz, Ryszard J.

出版者:

Worcester Polytechnic Institute

创建日期:

2009-05-07

Resource Type:

Dissertation

Degree:

PhD

Unit (Department):

Mechanical Engineering