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Joule heat effects on reliability of RF MEMS switches

Stichwort:

MEMS switches, thermal effects, and RF switches

Schöpfer:

Machate, Malgorzata S

Advisor:

Pryputniewicz, Ryszard J.

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2003-10-07

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering