Index Catalog // Hyrax

Filter löschen

Filtern nach: Unit (Department) Mechanical Engineering Stichwort palladium

Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Stichwort:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Schöpfer:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Herausgeber:

Worcester Polytechnic Institute

Datum erstellt:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering