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Deposition of Ultrathin Films of Niobium Pentoxide onto n+-Si (111) Using Atomic Layer Deposition

Palavra-chave:

Solar, Niobium Oxide, Atomic Layer Depositon, Silicon-Perovskite solar cells, Process Optimization, and Thin Films

O Criador:

Ramirez, Antonio

Advisor:

Grimm, Ronald and Kmiotek, Stephen J.

Editor:

Worcester Polytechnic Institute

Data Criada:

2022-04-28

Resource Type:

Major Qualifying Project