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Investigation of Measurement Artifacts Introduced By Horizontal Scanning Surface Profiling Instruments

关键词:

Scanning Instruments, Fractal, Anisotropy, Surface, Scanning, and Surface Metrology

创造者:

Bergstrom, Torbjorn S

Advisor:

Brown, Christopher A.

出版者:

Worcester Polytechnic Institute

创建日期:

2002-01-08

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Manufacturing Engineering