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1. Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Stichwort:: absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance
Schöpfer:: Arecco, Daniel
Advisor:: Pryputniewicz, Ryszard J.
Herausgeber:: Worcester Polytechnic Institute
Datum erstellt:: 2004-05-11
Resource Type:: Thesis
Degree:: MS
Unit (Department):: Mechanical Engineering