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cantilever
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Development of a wireless MEMS inertial system for health monitoring of structures
Keyword:
angular rate
,
inertial sensors
,
MEMS
,
health monitoring
,
cantilever
,
wireless
,
RF
,
tilt and rotation
, and
microcontroller
Creator:
Kok, Wing Hang (Ronald)
Advisor:
Furlong-Vazquez, Cosme
Publisher:
Worcester Polytechnic Institute
Date Created:
2004-11-24
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Keyword:
absorption
,
vibrometry
,
MEMS
,
Vibration
,
SEM
,
Hydrogen
,
Polymer
,
micromechanical
,
optoelectronic
,
cantilever
,
Sensor
,
frequency
,
AFM
,
Holography
,
Detection
,
Silicon
,
palladium
,
chemical
, and
resonance
Creator:
Arecco, Daniel
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2004-05-11
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
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Masters Theses
2
Year
2004
2
Creator
Arecco, Daniel
1
Kok, Wing Hang (Ronald)
1
Advisor
Furlong-Vazquez, Cosme
1
Pryputniewicz, Ryszard J.
1
Contributor
Furlong, Cosme
1
Furlong-Vazquez, Cosme
1
Hagglund, Raymond R.
1
Hou, Zhikun
1
Pryputniewicz, Ryszard J.
2
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»
Unit (Department)
Mechanical Engineering
2
Publisher
Worcester Polytechnic Institute
2
Resource type
Thesis
2