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- Palabra clave:
- absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance
- Creador:
- Arecco, Daniel
- Advisor:
- Pryputniewicz, Ryszard J.
- Editor:
- Worcester Polytechnic Institute
- Fecha de Creacion:
- 2004-05-11
- Resource Type:
- Thesis
- Degree:
- MS
- Unit (Department):
- Mechanical Engineering
