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palladium
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Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
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Masters Theses
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Year
2004
1
Creator
Arecco, Daniel
1
Advisor
Pryputniewicz, Ryszard J.
1
Contributor
Furlong, Cosme
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Hagglund, Raymond R.
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Pryputniewicz, Ryszard J.
1
Ruffin, Paul
1
Unit (Department)
Mechanical Engineering
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Publisher
Worcester Polytechnic Institute
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Resource type
Thesis
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