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shape and deformation measurement
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Development of a modular interferometric microscopy system for characterization of MEMS
Keyword:
Interferometry
,
shape and deformation measurement
,
Vibration
,
thermal
,
MEMS
,
vacuum
,
scanning white light
, and
vibrometry
Creator:
Klempner, Adam R.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2007-01-04
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
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Masters Theses
1
Year
2007
1
Creator
Klempner, Adam R.
1
Advisor
Pryputniewicz, Ryszard J.
1
Contributor
Burnham, Nancy A.
1
Marinis, Thomas F.
1
Pryputniewicz, Ryszard J.
1
Sullivan, John M.
1
Unit (Department)
Mechanical Engineering
1
Publisher
Worcester Polytechnic Institute
1
Resource type
Thesis
1
