Skip to Content
Toggle navigation
Home
Browse
Browse by Collection
Browse by Project Center
Browse Exhibits
About
Help
Explore, Discover, Share
Search
Advanced search
Search Constraints
Start Over
Filtering by:
Keyword
vibrometry
Remove constraint Keyword: vibrometry
1
-
2
of
2
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Development of a modular interferometric microscopy system for characterization of MEMS
Keyword:
Interferometry
,
shape and deformation measurement
,
Vibration
,
thermal
,
MEMS
,
vacuum
,
scanning white light
, and
vibrometry
Creator:
Klempner, Adam R.
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2007-01-04
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
Keyword:
absorption
,
vibrometry
,
MEMS
,
Vibration
,
SEM
,
Hydrogen
,
Polymer
,
micromechanical
,
optoelectronic
,
cantilever
,
Sensor
,
frequency
,
AFM
,
Holography
,
Detection
,
Silicon
,
palladium
,
chemical
, and
resonance
Creator:
Arecco, Daniel
Advisor:
Pryputniewicz, Ryszard J.
Publisher:
Worcester Polytechnic Institute
Date Created:
2004-05-11
Resource Type:
Thesis
Degree:
MS
Unit (Department):
Mechanical Engineering
Toggle facets
Limit your search
Collections
Masters Theses
2
Year
Year range begin
–
Year range end
Current results range from
2004
to
2007
View distribution
Creator
Arecco, Daniel
1
Klempner, Adam R.
1
Advisor
Pryputniewicz, Ryszard J.
2
Contributor
Burnham, Nancy A.
1
Furlong, Cosme
1
Hagglund, Raymond R.
1
Marinis, Thomas F.
1
Pryputniewicz, Ryszard J.
2
more
Contributors
»
Unit (Department)
Mechanical Engineering
2
Publisher
Worcester Polytechnic Institute
2
Resource type
Thesis
2
