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Filtrado por: Palabra clave vibrometry

Development of a modular interferometric microscopy system for characterization of MEMS

Palabra clave:

Interferometry, shape and deformation measurement, Vibration, thermal, MEMS, vacuum, scanning white light, and vibrometry

Creador:

Klempner, Adam R.

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2007-01-04

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering
Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor

Palabra clave:

absorption, vibrometry, MEMS, Vibration, SEM, Hydrogen, Polymer, micromechanical, optoelectronic, cantilever, Sensor, frequency, AFM, Holography, Detection, Silicon, palladium, chemical, and resonance

Creador:

Arecco, Daniel

Advisor:

Pryputniewicz, Ryszard J.

Editor:

Worcester Polytechnic Institute

Fecha de Creacion:

2004-05-11

Resource Type:

Thesis

Degree:

MS

Unit (Department):

Mechanical Engineering