The objective of this work is to develop a rigorous set of tests for comparing texture measurement systems and determining the uncertainty in the height measurements. Surface measurement systems are being used for increasingly finer scale metrology, and the criteria for surface textures are becoming more stringent. This work should facilitate the establishment or functional correlations. Traditionally, instrument comparisons have been made by measuring standard artifacts, or by using simple surface texture characterization parameters. like arithmetic average roughness, Ra. Our approach is to make the comparison based on measurements of any surface of Interest. and to make them with respect to three aspects of the measurements: location, heights, and the scale, or wavelength, on the measured surfaces. The standard deviations of the heights measured at a location in repeated scans of the same region are used to determine the uncertainties of local height measurements. Measurement systems are compared on cumulative uncertainty plots normalized by the mean Sq. Height difference maps show that disparities are the typically the greatest in regions of steep inclinations. The regression coefficients comparing the heights measured by two systems are surprisingly low. Area-scale fractal analysis clearly shows the scales where the sensitivities of measurement systems differ. The differences between measurements are obvious differences, sometimes even between sequential measurements on the same instrument.

Creator

• Brown, Christopher A.
• Kummailil, John
• Bergstrom, Torbjorn S.
• Hamel, Rebecca A.
• Gray, Amy R.

Publisher

• Shaker Verlag

Keyword

• Surface metrology
• Texture
• Roughness
• Uncertainty
• Height difference maps
• Multiscale geometric analyses
• Area-scale
• Sequential topographic measurements

Year

• 2004

Date created

• 2004

Resource type

• Conference Proceeding

Event

• XIth International Colloquium on Surfaces

Extent

• 9 pages

Rights statement

• In Copyright

Last modified

• 2023-04-18