This work addresses the safety features design of a GT Advanced Technologies silicon furnace. An over temperature relay, over pressure relay, silicon spill relay, chamber brake and emergency stop were created to prevent possible accidents from occurring. For each of these safety requirements the electric circuits and the processes that correspond to each safety feature were analyzed. The relays were then integrated into the existing furnace and each feature was tested. A Pspice simulation demonstrates the reliability of the protection system proposed.

• This report represents the work of one or more WPI undergraduate students submitted to the faculty as evidence of completion of a degree requirement. WPI routinely publishes these reports on its website without editorial or peer review.

Creator

• Mun, Alyssa Hope

Publisher

• Worcester Polytechnic Institute

Identifier

• E-project-042512-144543

Advisor

• Emanuel, Alexander E.

Year

• 2012

Sponsor

• GT Advanced Technologies

Date created

• 2012-04-25

Resource type

• Major Qualifying Project

Major

• Electrical & Computer Engineering

Rights statement

• In Copyright