Micro-Electromechanical Systems (MEMS) manufacturers face difficulties in characterizing material properties of MEMS post production. Properties such as stiffness can be obtained from simultaneous force and displacement measurements in full-field. We developed a prototype MEMS metrology system that uses a sub-micro Newton resolution force probe operating under a nanometer resolution interferometer to characterize MEMS mechanical properties. FEA simulations and analytical calculations were performed to help determine system constraints and validate results. Precision actuators were integrated and controlled from a developed graphical user interface. The system was tested on an Analog Devices ADXL202 accelerometer.

• This report represents the work of one or more WPI undergraduate students submitted to the faculty as evidence of completion of a degree requirement. WPI routinely publishes these reports on its website without editorial or peer review.

Creator

• McConnell, Michael Stewart
• Zhou, Shao
• Williams, John V.

Publisher

• Worcester Polytechnic Institute

Identifier

• E-project-042717-143702

Advisor

• Furlong-Vazquez, Cosme

Year

• 2017

Date created

• 2017-04-27

Resource type

• Major Qualifying Project

Major

• Interdisciplinary
• Robotics Engineering

Rights statement

• In Copyright

License

• All rights reserved