Analytical and experimental investigations of high-resolution MEMS pressure sensorsPublic
High-resolution MEMS pressure sensors are used in a wide range of applications, from appliances, as water level controllers, to medical instrumentation, for example in dialysis machines. MEMS pressure sensors are based on a piezoresistive thin diaphragm that is fabricated using standard IC procedures, including anisotropic etching. During operation, the thin diaphragm of the sensor deflects under pressure loadings, which produces electrical outputs. In this work, thin plate theory and finite element analyses are used to understand the mechanical response of the sensor as a function of applied pressures. However, as a result of different assumptions made in the analytical models, experimental methods, in the form of full-field-of-view laser interferometric microscopy, are applied to validate and update the models. Results will be used to study the reliability of pressure sensors under extreme conditions of operations in order to determine their suitability to high-resolution, high-reliability, applications.
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